Center for Nano and Microcontamination Control Proposals Copyright (c) 2013 Northeastern University All rights reserved. http://iris.lib.neu.edu/cnmc_proposals Recent documents in Center for Nano and Microcontamination Control Proposals en-us Tue, 21 May 2013 16:18:42 PDT 3600 The transport of contaminants in thin film deposition processes http://iris.lib.neu.edu/cnmc_proposals/9 http://iris.lib.neu.edu/cnmc_proposals/9 Wed, 25 Jul 2012 12:49:11 PDT John Cipolla Surface contamination Thin films Physical cleaning of submicron trenches, a modeling study http://iris.lib.neu.edu/cnmc_proposals/8 http://iris.lib.neu.edu/cnmc_proposals/8 Wed, 25 Jul 2012 12:45:29 PDT Ahmed A. Busnaina Surface contamination Nano and microscale particle removal http://iris.lib.neu.edu/cnmc_proposals/7 http://iris.lib.neu.edu/cnmc_proposals/7 Wed, 25 Jul 2012 12:42:30 PDT Ahmed A. Busnaina Particles Acoustic streaming Particle adhesion and removal for post-CMP applications http://iris.lib.neu.edu/cnmc_proposals/6 http://iris.lib.neu.edu/cnmc_proposals/6 Wed, 25 Jul 2012 12:39:36 PDT George G. Adams Particles Chemical mechanical planarization Development of a MEMs based micro gas analysis system http://iris.lib.neu.edu/cnmc_proposals/5 http://iris.lib.neu.edu/cnmc_proposals/5 Wed, 25 Jul 2012 12:33:57 PDT Nicol E. McGruer Gases - Analysis Microelectromechanical systems Establishing an IUCRC center for microcontamination control at Northeastern University: a planning meeting proposal http://iris.lib.neu.edu/cnmc_proposals/4 http://iris.lib.neu.edu/cnmc_proposals/4 Wed, 25 Jul 2012 12:27:31 PDT Northeastern University - Center for Nano and Microcontamination Control Contamination (Technology) Techniques for finding and characterizing defects and contaminants http://iris.lib.neu.edu/cnmc_proposals/3 http://iris.lib.neu.edu/cnmc_proposals/3 Wed, 25 Jul 2012 12:20:49 PDT Nathan E. Israeloff Surfaces (Technology) - Analysis Surfaces (Technology) - Defects Surface contamination The removal of submicron particles using CO2 aerosol with emphasis on post-CMP applications http://iris.lib.neu.edu/cnmc_proposals/2 http://iris.lib.neu.edu/cnmc_proposals/2 Wed, 25 Jul 2012 12:09:06 PDT Ahmed A. Busnaina Chemical mechanical planarization Surfaces (Technology) The mechanics of CMP and post-CMP cleaning http://iris.lib.neu.edu/cnmc_proposals/1 http://iris.lib.neu.edu/cnmc_proposals/1 Wed, 25 Jul 2012 12:03:59 PDT Sinan Müftü Chemical mechanical planarization Surfaces (Technology)