Alternate Title
Proposal #5: the transport of contaminants in thin film deposition processes
Keywords
contaminants, electrostatics
Subject Categories
Surface contamination, Thin films
Disciplines
Engineering Science and Materials | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2002
Rights Holder
Northeastern University
Recommended Citation
Cipolla, John; Busnaina, Ahmed A.; and McGruer, Nicol E., "The transport of contaminants in thin film deposition processes" (2002). Center for Nano and Microcontamination Control Proposals. Paper 9.
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COinS
Notes
Proposal #5 from the Center for Nano and Microcontamination control published in 2002. 1 page.