Alternate Title

Proposal #5: the transport of contaminants in thin film deposition processes

Notes

Proposal #5 from the Center for Nano and Microcontamination control published in 2002. 1 page.

Keywords

contaminants, electrostatics

Subject Categories

Surface contamination, Thin films

Disciplines

Engineering Science and Materials | Nanoscience and Nanotechnology

Publisher

Northeastern University

Publication Date

2002

Rights Holder

Northeastern University

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