Alternate Title
Proposal #3: physical cleaning of submicron trenches, a modeling study
Keywords
cleaning, particles, nano, micro
Subject Categories
Surface contamination
Disciplines
Materials Science and Engineering | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2001
Rights Holder
Northeastern University
Recommended Citation
Busnaina, Ahmed A., "Physical cleaning of submicron trenches, a modeling study" (2001). Center for Nano and Microcontamination Control Proposals. Paper 8.
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COinS
Notes
Proposal #3 from the Center for Nano and Microcontamination Control published in 2001. 2 pages.