Alternate Title
Proposal #7: nano and microscale particle removal
Keywords
particle removal, cleaning process
Subject Categories
Particles, Acoustic streaming
Disciplines
Engineering Science and Materials | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2002
Rights Holder
Northeastern University
Recommended Citation
Busnaina, Ahmed A., "Nano and microscale particle removal" (2002). Center for Nano and Microcontamination Control Proposals. Paper 7.
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COinS
Notes
Proposal #7 from the Center for Nano and Microcontamination Control published in 2002. 2 pages.