Alternate Title

Proposal #7: nano and microscale particle removal

Notes

Proposal #7 from the Center for Nano and Microcontamination Control published in 2002. 2 pages.

Keywords

particle removal, cleaning process

Subject Categories

Particles, Acoustic streaming

Disciplines

Engineering Science and Materials | Nanoscience and Nanotechnology

Publisher

Northeastern University

Publication Date

2002

Rights Holder

Northeastern University



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