Alternate Title
Proposal #6: particle adhesion and removal for post-CMP applications
Keywords
CMP, clean
Subject Categories
Particles, Chemical mechanical planarization
Disciplines
Materials Science and Engineering | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2002
Rights Holder
Northeastern University
Recommended Citation
Adams, George G.; Busnaina, Ahmed A.; and Müftü, Sinan, "Particle adhesion and removal for post-CMP applications" (2002). Center for Nano and Microcontamination Control Proposals. Paper 6.
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COinS
Notes
Proposal #6 from the Center for Nano and Microcontamination Control published in 2002. 2 pages.