Proposal #1: development of a MEMs based micro gas analysis system
CEM, MEM, plasma
Gases - Analysis, Microelectromechanical systems
Materials Science and Engineering | Nanoscience and Nanotechnology
McGruer, Nicol E. and Hopwood, Jeffrey A., "Development of a MEMs based micro gas analysis system" (2001). Center for Nano and Microcontamination Control Proposals. Paper 5.
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