Alternate Title
Proposal #1: development of a MEMs based micro gas analysis system
Keywords
CEM, MEM, plasma
Subject Categories
Gases - Analysis, Microelectromechanical systems
Disciplines
Materials Science and Engineering | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2001
Rights Holder
Northeastern University
Recommended Citation
McGruer, Nicol E. and Hopwood, Jeffrey A., "Development of a MEMs based micro gas analysis system" (2001). Center for Nano and Microcontamination Control Proposals. Paper 5.
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COinS
Notes
Proposal #1 from the Center for Nano and Microcontamination Control published in 2001. 3 pages.