Alternate Title
Proposal #4: the mechanics of CMP and post-CMP cleaning
Keywords
CMP cleaning, particles
Subject Categories
Chemical mechanical planarization, Surfaces (Technology)
Disciplines
Materials Science and Engineering | Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2002
Rights Holder
Northeastern University
Recommended Citation
Müftü, Sinan; Busnaina, Ahmed A.; and Adams, George G., "The mechanics of CMP and post-CMP cleaning" (2002). Center for Nano and Microcontamination Control Proposals. Paper 1.
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COinS
Notes
Center for Nano and Microcontamination Control Proposal #4 published in 2002. 2 pages.