Keywords
particle adhesion, CMP, adhesion
Disciplines
Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2001
Rights Holder
Northeastern University
Recommended Citation
Adams, George G.; Busnaina, Ahmed; and Müftü, Sinan, "Particle Adhesion and Removal in Post-CMP Applications" (2001). Center for Nano and Microcontamination Control Presentations. Paper 7.
COinS
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Notes
A presentation by the Center for Nano and Microcontamination Control in 2001.