Keywords
CMP, cleaning, particles, lubrication
Disciplines
Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2002
Rights Holder
Northeastern University
Recommended Citation
Müftü, Sinan; Busnaina, Ahmed; and Adams, George G., "The Mechanics of CMP and Post-CMP Cleaning" (2002). Center for Nano and Microcontamination Control Presentations. Paper 5.
COinS
Click button above to open, or right-click to save.
Notes
A presentation by the Center for Nano and Microcontamination Control in 2002.