Keywords
particles, particle motion
Disciplines
Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
10-17-2001
Rights Holder
Northeastern University
Recommended Citation
Cipolla, John; Busnaina, Ahmed; and McGruer, Nicol E., "The Transport of Contaminants in Thin Film Deposition Processes" (2001). Center for Nano and Microcontamination Control Presentations. Paper 4.
COinS
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Notes
A presentation by the Center for Nano and Microcontamination Control on October 17, 2001.