Keywords
trenches, submicron
Disciplines
Nanoscience and Nanotechnology
Publisher
Northeastern University
Publication Date
2001
Rights Holder
Northeastern University
Recommended Citation
Busnaina, Ahmed, "Physical Cleaning of Submicron Trenches and Vias" (2001). Center for Nano and Microcontamination Control Presentations. Paper 3.
COinS
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Notes
A presentation by the Center for Nano and Microcontamination Control in 2001.