Follow

Submissions from 2007

PDF

Research Focus at the NSF Center for Nano and Microcontamination Control, Ahmed Busnaina

Submissions from 2002

PDF

Division of Technology Transfer, Center for Nano and Microcontamination Control, Northeastern University

PDF

The Mechanics of CMP and Post-CMP Cleaning, Sinan Müftü, Ahmed Busnaina, and George G. Adams

Submissions from 2001

PDF

Particle Adhesion and Removal in Post-CMP Applications, George G. Adams, Ahmed Busnaina, and Sinan Müftü

PDF

Nano and Microscale Particle Removal, Ahmed Busnaina

PDF

Physical Cleaning of Submicron Trenches and Vias, Ahmed Busnaina

PDF

The Transport of Contaminants in Thin Film Deposition Processes, John Cipolla, Ahmed Busnaina, and Nicol E. McGruer

PDF

Development of New Methods for Locating and Characterizing Defects and Contaminants, N. E. Israeloff and Ahmed Busnaina