Submissions from 2007
Research Focus at the NSF Center for Nano and Microcontamination Control, Ahmed Busnaina
Submissions from 2002
Division of Technology Transfer, Center for Nano and Microcontamination Control, Northeastern University
The Mechanics of CMP and Post-CMP Cleaning, Sinan Müftü, Ahmed Busnaina, and George G. Adams
Submissions from 2001
Particle Adhesion and Removal in Post-CMP Applications, George G. Adams, Ahmed Busnaina, and Sinan Müftü
Nano and Microscale Particle Removal, Ahmed Busnaina
Physical Cleaning of Submicron Trenches and Vias, Ahmed Busnaina
The Transport of Contaminants in Thin Film Deposition Processes, John Cipolla, Ahmed Busnaina, and Nicol E. McGruer
Development of New Methods for Locating and Characterizing Defects and Contaminants, N. E. Israeloff and Ahmed Busnaina